Semiconductor Manufacturing Automation
Semiconductor manufacturing is arguably the most complex of manufacturing environments. Reasons for this include tightly constrained production processes, reentrant process flows, expensive sophisticated equipment, variable demand, high levels of automation and an ocean of data. Yet, despite the difficulties, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and indirectly (via business services, for example), to the global economy. With the emergence of highly automated wafer fabrication facilities (fabs), there is a compelling trend to extend the traditional automation scope to integrate with advanced decision technologies (such as Operations Research, Artificial Intelligence and Queuing Theory).
The IEEE RAS Technical Committee on Semiconductor Manufacturing Automation strives to:
- Promote basic and applied research in semiconductor manufacturing and automation;
- Provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers; and
- Facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)
Topics of interest include, but are not limited to:
- Advanced process control (APC)
- Agent based intelligent systems
- Algorithms for planning, scheduling and coordination
- Automated material handling systems (AMHS)
- Automation in 300mm prime/450mm wafer generations
- Benchmark and case studies
- Big data analytics for semiconductor manufacturing
- Cluster tool scheduling and design
- Data mining for yield and production improvement
- Decision support systems (DSS)
- Decision technologies for equipment automation
- Design concepts for equipment and related automation
- Design for manufacturing (DFM)
- Engineering and design chain optimization
- Equipment engineering systems (EES)
- Equipment modeling and optimization
- Equipment productivity improvement
- Factory of the future
- Factory/cell/equipment-level controller design
- Factory modeling, analysis and performance evaluation
- Fully automated factory and remote operation center
- Green semiconductor manufacturing
- Maintenance policy optimization
- Manufacturing execution systems (MES)
- Mobile and wireless applications (RFID)
- Semiconductor supply chain modeling and optimization
- Simulation methodologies for semiconductor manufacturing
- Virtual metrology (VM) and its automation (AVM)
- Wafer release and dispatch policies
- Yield enhancement systems and e-Diagnosis
TC members, board and co-chairs annually organize and attend meetings for our community.
- December 11-14, 2016: The 12th Annual MASM (Modeling and Analysis of Semiconductor Manufacturing) will be held within the 2016 Winter Simulation Conference in Arlington, VA, USA. (http://meetings2.informs.org/wordpress/wintersim2016/masm/)
- August 7-10, 2016: The International Symposium on Semiconductor Manufacturing Intelligence (ISMI 2016) will be held on the campus of the National Tsing Hua University (NTHU), Hsinchu, Taiwan. (https://dalab.ie.nthu.edu.tw/ISMI2016/)
- February 8-12, 2016: Dagstuhl Seminar 16062 on Modeling and Analysis of Semiconductor Supply Chains, Dagstuhl, Germany. (https://www.dagstuhl.de/schedules/16062.pdf)
TC members, board and co-chairs develop and serve as guest editors for special issues of journals on topics of interest to our community.
- Special issue of Applied Soft Computing on “Applied Soft Computing for Smart Production to Empower Industry 4.0”. Manuscript submission by September 30, 2016. Expected publication: 2Q 2017.
- Special issue of the International Journal of Industrial Engineering: Theory, Applications and Practice (IJIETAP) on “The Role of Industrial Engineers to Empower Industry 4.0”. Manuscript submission by November 30, 2016. Expected publication: 4Q 2017.
- Special issue of the International Journal of Computational Intelligence Systems (IJCIS) on “Computational Intelligence and Data Science for Decision Making in Industrial Engineering”. Manuscript submission by September 30, 2016. Expected publication: 2Q 2017
- Special issue of the International Journal of Production Research (IJPR) on “Modelling and Analysis of Semiconductor Supply Chains”. Manuscript submission by November 1, 2016 (extended). Expected publication: 1Q 2018.